Description

SLE (selective laser-induced etching) is a new laser technology for rapid manufacturing of true 3D devices made out of transparent material consisting of cavities, tunnels and even mounted moving parts. SLE is a two-step process: In a first step ultra-short pulsed laser radiation is focused to micrometer-sized focus to permanently modify the transparent material internally. This laser modification is done without cracks and with high precision not to be confused with the 3D pictures in glass consisting of micro cracks. An arbitrary 3D connected volume is exposed inside the glass by 3D scanning of the focus. In a second step of developing only the modified material is removed by wet chemical etching starting at a surface of the workpiece.